110 GHz on-wafer measurement comparison on alumina substrate

Thorsten Probst, Ralf Dörner, Matthias Ohlrogge, Roger Lozar & Uwe Arz
This paper reports on initial results of a three-party on-wafer measurement comparison carried out on a custom-made alumina calibration substrate in the frequency range up to 110 GHz. The correction of the vector network analyzer measurement is done with the highly accurate multiline TRL (mTRL) calibration. The focus of the investigation is on the influence of the measurement system, the probe geometry and operator skills. The results of the calibrations are presented and the influence...
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