On the importance of calibration standards definitions for on-wafer measurements up to 110 GHz

Thorsten Probst, Sherko Zinal, Ralf Dörner & Uwe Arz
This paper reports on the follow-up evaluation of an on-wafer measurement comparison on custom-made and conventional alumina calibration substrates in the frequency range up to 110GHz. The focus of the current investigation is on the performance of different calibration methods used for correcting device under test (DUT) measurements on the custommade substrate. Four different calibration schemes are discussed and the results of the calibration methods are presented and compared.
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