On-wafer residual error correction through adaptive filtering of verification line measurements

Uwe Arz & Aleksandr Savin
In this paper we compare the performance of a residual error correction algorithm against the performance of its predecessor and investigate its ability to second-order correct on-wafer calibrations which are widely used in industry. Independent of the calibration standard definition and the calibration method used, consistent results are obtained after applying the residual error correction.
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