Anomalies in multiline-TRL-corrected measurements of short CPW lines

Gia Ngoc Phung & Uwe Arz
Microwave probes in on-wafer measurements contribute to a number of parasitic effects deteriorating the accuracy of multiline Thru Reflect Line (mTRL) calibrations. The accuracy of mTRL calibration is especially sensitive in Devices under Test (DUTs) of shorter line length. It has been demonstrated in previous experimental studies that the calibrated results are often only reliable as long as the length of the line is at least 2 mm. However, the reasons behind this phenomenon have...
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