Suspended Trace Air-Gap Resonators for Low Loss Superconducting Circuits

Michael Tianyu Fang
Quantum memories and networks for distributed quantum information processing require links between the microwave, mechanical, and optical domains. Coherent integration of long-lived superconducting qubits (SCQs) with optomechanical and photonic devices (OMPDs) remains an outstanding challenge. We present a step towards coherent integration using a suspended trace air-gap resonator (STAR): a superconducting resonator on a silicon-on-insulator (SOI) substrate with the signal trace suspended by silicon tethers above and between galvanically connected ground metal planes. As a...
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